杈愬皠寮忓姞鐑櫒
鍔犵儹娓╁害楂橈紝鍔犵儹鍧囧寑鎬уソ錛涘彲榪炵畫鏃嬭漿錛岄傜敤浜庡ぇ灝哄鍩虹墖
閫傜敤浜庤剦鍐叉縺鍏夋矇縐郴緇燂紙PLD錛夈佺鎺ф簠灝勭郴緇燂紙sputtering錛夈佺數(shù)瀛愭潫钂稿彂緋葷粺錛圗-beam evaporation錛夌瓑銆?/span>
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杈愬皠寮忓姞鐑櫒
鍔犵儹娓╁害楂橈紝鍔犵儹鍧囧寑鎬уソ錛涘彲榪炵畫鏃嬭漿錛岄傜敤浜庡ぇ灝哄鍩虹墖
閫傜敤浜庤剦鍐叉縺鍏夋矇縐郴緇燂紙PLD錛夈佺鎺ф簠灝勭郴緇燂紙sputtering錛夈佺數(shù)瀛愭潫钂稿彂緋葷粺錛圗-beam evaporation錛夌瓑銆?/span>
鏈楂樺姞鐑俯搴?/span>錛?/span>1000擄C
鏍峰搧灝哄錛?/span>鏈澶?/span>8鑻卞
鍔犵儹紼沖畾鎬э細鹵1擄C
鍗囨俯閫熺巼錛?/span>10擄C/min