鐢?shù)闃诲紡鍔犵儹鍣?/span>
閾犺鍔犵儹涓濓紝鑰愰珮娓┿侀珮姘у帇錛涙彃鎷斿紡璁捐錛屾柟渚挎竻媧椼佺淮鎶?/span>
閫傜敤浜庤剦鍐叉縺鍏夋矇縐郴緇燂紙PLD錛夈佺鎺ф簠灝勭郴緇燂紙sputtering錛夈佺數(shù)瀛愭潫钂稿彂緋葷粺錛圗-beam evaporation錛夌瓑銆?/span>
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鐢?shù)闃诲紡鍔犵儹鍣?/p> 榪斿洖鍒楄〃
鐢?shù)闃诲紡鍔犵儹鍣?/span>
閾犺鍔犵儹涓濓紝鑰愰珮娓┿侀珮姘у帇錛涙彃鎷斿紡璁捐錛屾柟渚挎竻媧椼佺淮鎶?/span>
閫傜敤浜庤剦鍐叉縺鍏夋矇縐郴緇燂紙PLD錛夈佺鎺ф簠灝勭郴緇燂紙sputtering錛夈佺數(shù)瀛愭潫钂稿彂緋葷粺錛圗-beam evaporation錛夌瓑銆?/span>
鏈楂樺姞鐑俯搴︼細(xì)900擄C
鏍峰搧灝哄錛?/span>鏈澶?鑻卞
鍔犵儹紼沖畾鎬э細(xì)鹵1擄C
鍗囨俯閫熺巼錛?/span>20擄C/min